Business

Business Area

  • Valve (EtherCAT)
  • Motion Control
  • Sub System

Development and manufacturing of semiconductor core components/modules

  • • Vacuum valve for semiconductor equipment (APC and Throttle Valve, EtherCAT communication method)
  • • Semiconductor motion control and signal processing components (Tray Counter Module, I/O Board, Motor Driver Module)
  • • Module design/manufacturing/assembly for semiconductor equipment (EtherCAT chamber, other parts, etc.)
  • Video